♦Authors:
Bin Zhu,Zhuoqing Yang,Wenguo Chen,Qifa Liu,Guifu Ding,Xiaolin Zhao
♦Journal:
Advanced Materials Research Vols.472-475(2012) pp827-830
♦Keywords:
inertial micro-switch,FEM,Contact Dynamics simulation.
♦Abstract:
A novel inertial micro-switch with polymer-metal composite fixed electrode has been designed based on non-silicon surface micromachining technology. The micro-switch can sense the applied accelerations from positive z-axis. It can realize a flexible contact between the electrodes, eliminate the bouncing phenomenon and prolong the contact time. The dynamic contact simulation of the micro-switch has been implemented under the half-sine wave shock with 80g peak value, and its vertical response time is about ~80µs.