Quantitative dimensional metrology of Nano- and microstructures are increasingly demanded following the rapid developments in, for instance, semiconductor and precision engineering industry, microsystem technology and materials science.In the recent years, coordinate measuring machines (CMMs) have become versatile and widespread metrology tools. Probing system is an important component of a CMM. A probing system based on a high accurate positioning transducer is crucial for micro and Nano metrology. This paper presents a probing system based on a micro-fabricated variable capacitive transducer which has advantages of simple structure, low cost, high sensitivity, overload ability, excellent dynamic response characteristics, etc. The structure of variable capacitor was designed and optimized by means of finite element method (FEM), and then variable capacitor was micro- fabricated by MEMS technology process.